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Energy Harvesting from WBAN
https://search.brave.com/search?q=what+are+the+structural+components+of+smart+dust&source=web
A typical "smart dust" particle, often called a "mote", is primarily composed of a sensor to detect environmental data, a processing unit (microcontroller) to interpret the sensor data, a communication transceiver to send information wirelessly, and a power source like a small battery or energy harvesting mechanism, all integrated into a tiny package with minimal size and power consumption; essentially, a sensor, a processing circuit, a communication module, and a power supply.
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https://ieeexplore.ieee.org/abstract/document/9810001
Microelectromechanical systems (MEMS) are made from a variety of materials, including metals, ceramics, polymers, and silicon. The choice of material affects the device's performance and reliability.
https://search.brave.com/search?q=what+materials+are+MEMS+made+of&source=web
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https://www.researchgate.net/publication/385448821_A_Highly_Power-and_Area-Efficient_PMU_for_Cell-Size_Autonomous_Microsystems
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https://www.researchgate.net/publication/2955370_Smart_dust_communicating_with_a_cubic-millimeter_computer_Computer_34144-51_DOI_1011092895117
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https://link.springer.com/chapter/10.1007/978-3-030-38516-3_9
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